Yarı iletken yonga parlatmada kullanılan yeşil silisyum karbür (SiC) tozu önemli bir malzemedir. Yüksek sertliği, mükemmel kimyasal kararlılığı ve termal kararlılığı nedeniyle hassas parlatma işlemlerinde yaygın olarak kullanılır.
1. Yeşil silisyum karbürün özellikleri
—Yüksek sertlik (Mohs sertliği 9.2): Elmas ve kübik bor nitrürden sonra ikinci sıradadır, sert malzemelerin (silisyum, silisyum karbür gofretler gibi) işlenmesi için uygundur.
—Kimyasal inertlik: Oda sıcaklığında asit ve alkalilerle reaksiyona girmez, böylece gofret yüzeyinin kirlenmesini önler.
—Isıl kararlılık: Yüksek sıcaklıklarda performansını koruyabilir, yüksek hızlı parlatma için uygundur.
–Keskin parçacık şekli: Verimli kesme yeteneği sağlar, ancak çizikleri önlemek için parçacık düzgünlüğünün kontrol edilmesi gerekir.
TİPİK KİMYASAL ANALİZ | |
SiC | ≥%99,05 |
SiO2 | ≤0,20% |
F,Si | ≤0,03% |
Fe2O3 | ≤0,10% |
FC | ≤0,04% |
TİPİK FİZİKSEL ÖZELLİKLER | |
Sertlik: | Mohs:9.5 |
Erime Noktası: | 2600 ℃’de süblimasyon |
Maksimum servis sıcaklığı: | 1900℃ |
Özgül Ağırlık: | 3,20-3,25 g/cm3 |
Yığın yoğunluğu(LPD): | 1,2-1,6 gr/cm3 |
Renk: | Yeşil |
Parçacık şekli: | Altıgen |
2. Yarı iletken parlatmada uygulama
—Kaba parlatma aşaması: Gofret yüzeyindeki daha büyük kusurları veya işleme izlerini (dilimleme ve öğütme sonrası hasarlı katmanlar gibi) gidermek için kullanılır.
—Silisyum karbür (SiC) yonga parlatma: Yeşil silisyum karbür, yüzey hasarını azaltmak için SiC yonga malzemelerinin sertliğiyle eşleşir.
—Yardımcı uygulamalar: Safir alt tabakalar ve optik cam gibi sert ve kırılgan malzemelerin parlatılmasında kullanılır.
3. Temel kalite gereksinimleri
—Parçacık boyutu dağılımı: Büyük parçacıkların neden olduğu çizikleri önlemek için son derece düzgün olması gerekir (örneğin D50 1–5μm).
—Saflık: Metal safsızlıklarının (Fe, Al gibi) neden olduğu kontaminasyonu azaltmak için yüksek saflık (≥ %99,9).
—Parçacık morfolojisi: Yüzey pürüzlülüğünü azaltmak için küresel veya eş alanlı olması gerekir.
—Süspansiyon: Çökelmeyi önlemek için cilalama sıvısında kararlı dispersiyon.
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